Filmetrics Profilm3D and Profilm3D-200 | White Light Interferometry (WLI)

Product Description

The Filmetrics Profilm3D and Filmetrics Profilm3D-200 white light interferometers generate high-resolution measurements of the surface topography with sub-nanometer-level resolution. The tools support both vertical scanning and phase shifting interferometry. Phase Shift Imaging (PSI) can also be combined with WLI to enable PSI sensitivity over larger surface Z variation. Using TotalFocus^? technology, Profilm3D provides stunning 3D natural color images with every pixel in focus. The latest generation of the Profilm3D white light interferometer introduces Enhanced Roughness imaging for measuring rougher surfaces, higher slopes and lower reflectivity surfaces.

In the Profilm3D measurement technique, the vertical resolution of the measurement is independent of the numerical aperture of the objective, enabling high-resolution measurements with a large field of view. The measured area can be further increased by stitching multiple fields of view into a single measurement. The Profilm3D optical profilometer also features a simple, innovative user interface and automated features to support a broad range of working environments, from R&D to production.

Features

Vertical scanning and phase shifting interferometry for measurement of surface features from nanometers to millimeters
TotalFocus 3D imaging with optimized focus for each pixel through the full measured range
True-Color imaging produces the actual sample colors for enhanced visualization, especially for subtle or buried features
Enhanced Roughness Mode (ERM) increases fringe contrast for improved fidelity on sloped surfaces such as lenses and enables signal improvement for rough surfaces
Automated focus with industry-leading long piezo travel range for scanning multiple surfaces separated by large height distances
Automated X-Y stage with a long travel range, great for mapping and stitching scans

Applications

Step height: 3D step height from nanometers to millimeters
Texture & Form: 3D roughness, waviness, bow and shape
Texture characterization
Edge rolloff: 3D edge profile measurements
Defect review: 3D defect surface topography, defect characterization
High resolution scans over large, transparent film surfaces
High roughness, low reflectivity, scratch characterization

Industries

Universities, research labs and institutes
Silicon and compound semiconductor
Precision optics and mechanics
Medical devices
LED: Light emitting diodes
Power devices
MEMS: Micro-electromechanical systems
Data storage
Automotive
And more: Contact us with your requirements

Step Height

The Filmetrics Profilm3D series white light interferometry-based profilometers support non-contact measurement of 3D step heights from nanometer to millimeter scales. Vertical scanning interferometry can measure a large step height with nanometer-level resolution. Sub-nanometer-level features can be measured rapidly using phase-shifting interferometry. Z-stitching interferometry enables rapid measurement of very large steps with multiple high-resolution scans that are combined into a single measurement. This variety of techniques enables users to quantify the amount of material removed or deposited by semiconductor processes such as etch, sputter, deposition, spin coating and more.

Texture: Roughness and Waviness

The Filmetrics Profilm3D series optical profilers provide non-contact measurements of 3D texture, quantifying the sample’s roughness and waviness. Phase-shifting mode is ideal for very smooth surfaces. Software filters separate the measurement into roughness and waviness components and calculate parameters such as root mean square (RMS) roughness.

Form: Bow and Shape

The Filmetrics Profilm3D series non-contact, white light interferometry-based profilers can measure the 3D shape or bow of a surface. This capability can be used to measure the radius of curvature of a lens or the shape of a medical implant, such as a hip joint or stent.

TotalFocus^?

The Filmetrics Profilm3D series optical profilometers with TotalFocus capture True Color 3D images with every pixel in focus. This feature can be used to distinguish boundaries between materials with different optical properties.

The options for the Filmetrics^® Profilm3D^® Optical Profilometer are available to add on with your new product, or in the future. Contact your sales rep to learn more.

Profilm3D Series

The Filmetrics Profilm3D white light interferometer features motorized X-Y and Z stages with 100mm travel and a manual tip/tilt stage. The system supports phase shifting and vertical scanning interferometry for high-resolution 3D surface topography measurements.

The Filmetrics Profilm3D-200 white light interferometer includes the same features as the Profilm3D but adds a larger motorized X-Y stage supporting 200mm by 200mm of travel.

Profilm Software Suite

The Filmetrics Profilm software package is comprehensive, intuitive, fast and user-friendly. 3D data operations and analysis functions such as leveling, filtering, step height, roughness, and surface topography analysis techniques are included in the basic configuration. Profilm supports ISO roughness calculation methods, plus local standards, such as ASME.

Objective Lenses

The four-position turret holds objective lenses with magnifications ranging from 5X to 100X, to support nano-, micro- and macro-topography applications. The 5X objective is a Michelson interferometry objective. The 10X, 20X, 50X, and 100X objectives are Mirau interferometry objectives.

Stages

Motorized stages for the X-Y and Z axes are standard on the Profilm3D system. The X-Y stage has a travel of 100mm by 100mm for Profilm3D, and 200mm by 200mm for Profilm3D-200. The Z stage has a range of 100mm. The travel along all axes of motion is programmable. A manual tip and tilt stage are standard with ±5° of motion.

A manual R-theta wafer stage is also available on Profilm3D series optical profilometers, supporting 50mm- to 200mm-diameter wafers. In addition, the Profilm3D-200 supports an adapter for holding up to 200mm wafers.

Isolation Tables

The Filmetrics Profilm3D series offers Accurion Nano30 Series active tabletop vibration isolation systems, which use electro-dynamic drive active vibration isolation in all six degrees of freedom.

Step Height Standards

The Filmetrics Profilm3D series includes a custom-designed Cr on Si 10?m step height standard, consisting of an etched step with a chrome coating. A multi-step height standard is also available as an option, featuring 0.1?m, 2?m and 4?m steps.

3D and Flash Printing

The Profilm3D easily measures this silkscreen print on machined stainless steel. Measure thickness and uniformity of the printing layer and characterize delamination, coverage uniformity and surface roughness. The Profilm3D design offers easy sample setup and software interface to streamline manufacturing and QC process monitoring.

Metal Finishing / Micromachining / Tooling

The Profilm3D can be used in metal finishing and tooling, such as for the critical calibration of a dicing saw where cut depths into a piezoelectric material are quantified. The system also simultaneously measures surface roughness and critical dimensions of machined components.

Semiconductors

Backend packaging bump coplanarity is critical to ensure optimized bonding, and the Profilm3D quickly generates measurements of coplanarity, pitch uniformity, size, and more. Other applications include mask manufacturing, laser marking, photoresist patterning, and other R&D and process qualification.

Optics

This scan shows a miniaturized Fresnel lens that was created by electron beam lithography. For steep surfaces such as lenses, the Profilm3D in Enhanced Roughness mode can now measure up to 60° of slope.

Biology

The Profilm3D is well suited to measurement of biological samples, such as this Tetraphenylprophyrin (TPP) thin film on glass. The TPP was imaged with the 50X Mirau objective at 2X zoom, and the film displays growth of crystalline structures. This image was generated with TotalFocus^? color technology, showing the actual colors of the sample.

17AV网

Filmetrics^® Profilm3D^® Optical Profilometer

Filmetrics^® Profilm3D^® Optical Profilometer

Product Description

Features

Applications

Industries

Step Height

Texture: Roughness and Waviness

Form: Bow and Shape

TotalFocus^?

Profilm3D Series

Profilm Software Suite

Objective Lenses

Stages

Isolation Tables

Step Height Standards

3D and Flash Printing

Metal Finishing / Micromachining / Tooling

Semiconductors

Optics

Biology

Solar Cell Metrology Solutions

Objective Lens Selection

Zeta^?-20 Optical Profiler

Stylus Profilers

Optical Profilers

Instruments

Ready to get started?

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17AV网

Filmetrics® Profilm3D® Optical Profilometer

Filmetrics® Profilm3D® Optical Profilometer

Product Description

Features

Applications

Industries

Step Height

Texture: Roughness and Waviness

Form: Bow and Shape

TotalFocus?

Profilm3D Series

Profilm Software Suite

Objective Lenses

Stages

Isolation Tables

Step Height Standards

3D and Flash Printing

Metal Finishing / Micromachining / Tooling

Semiconductors

Optics

Biology

Solar Cell Metrology Solutions

Objective Lens Selection

Zeta?-20 Optical Profiler

Stylus Profilers

Optical Profilers

Instruments

Ready to get started?

Are you sure?

Filmetrics^® Profilm3D^® Optical Profilometer

Filmetrics^® Profilm3D^® Optical Profilometer

TotalFocus^?

Zeta^?-20 Optical Profiler